Characterization of femtosecond laser-written waveguides in silicon

Namig Alasgarzade,Alessandro Alberucci,Markus Blothe,Maxime Chambonneau,Chandroth P. Jisha,Stefan Nolte

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We characterize laser-written waveguides in silicon versus the inscription parameters such as scanning speed and pulse energy. The analysis is carried out at different wavelengths and polarization states. Finally, the silicon sample is annealed to investigate the possible mechanism that leads to positive refractive index changes.

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