An Etchless Integration Platform for Superconducting Nanowire Single Photon Detectors

Filippo Martinelli, Darren M. Z. Koh,Shuyu Dong,Anton N. Vetlugin,Harish N. S. Krishnamoorthy,Christian Kurtsiefer,Cesare Soci

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We introduce a new etchless integration platform for superconducting nanowire single photon detectors based on bound states in the continuum polymer strip waveguides, which enables dense fabrication of high-efficiency detectors in planar photonics circuits.

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