Artificial-Intelligence Empowered Universal Metrology Optical Camera

Arturo Burguete-Lopez,Maksim Makarenko,Qizhou Wang,Fedor Getman,Andrea Fratalocchi

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We introduce a metrology platform that employs artificial intelligence in hardware through optical metasurfaces. We experimentally demonstrate the measurement of thin film thickness and refractive index maps with nanometer accuracy using this platform.

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