Extreme Ultraviolet Metaoptics enabled by Vacuum Guiding

Marcus Ossiander, Hana K. Hampel,Maryna L. Meretska, Soon Wei D. Lim, Nico Knefz,Thomas Jauk,Martin Schultze,Federico Capasso

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We experimentally demonstrate a dielectric metalens operating at 50 nm wavelength by leveraging that holes in a Silicon membrane guide extreme ultraviolet light. A knife edge measurement shows focusing down to 1.7 times the diffraction limit.

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关键词

50 nm wavelength,dielectric metalens,extreme ultraviolet metaoptics,knife edge measurement,leveraging,Silicon membrane guide extreme ultraviolet light,vacuum guiding,wavelength 50.0 nm

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