Waveguide-Coupled Disk Resonators on a Crack-Free Si3N4 Film with a Dense Stress Release Pattern

2019 Conference on Lasers and Electro-Optics (CLEO)（2019）

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摘要

We deposit a crack-free 780nm-thick Si 3 N 4 film on a dense stress release pattern on a 100mm silicon wafer. Our fabricated waveguide-coupled 920μm-radius Si 3 N 4 disk resonator reveals a high loaded quality factor of 1.7×10 ⁶ . © 2019 The Author(s)

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关键词

crack-free Si3N4 film,Si3N4 disk resonator,silicon wafer,dense stress release pattern,waveguide-coupled disk resonators,size 100.0 mm,size 920 mum,Si3N4,Si

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