Suppression of Transverse Mode on LiNbO3/ Quartz Hetero Acoustic Layer Surface Acoustic Wave Resonator by Zigzag Shape Apodization

Transverse mode suppression is a great challenge for high performance surface acoustic wave (SAW) resonators. Conventional methods only work well on narrow band resonators and will cause severe quality (Q) factor deterioration if they are directly applied to wideband resonators. In this work, we designed and fabricated new dummy electrode shapes and new apodization shapes to suppress transverse modes in a wideband LiNbO 3 /Quartz resonator. The results show that the shape of the dummy electrode is not the dominant factor to affect the transverse mode. The zigzag shape apodization can realize high Q factor with suppressed transverse mode.