Silicon nitride subwavelength grating metamaterial waveguides functionalized with atomic layer deposited Al2 O3 cladding
2023 Photonics North (PN)(2023)
摘要
We report on subwavelength grating metamaterial waveguides fabricated on a rapid prototyping silicon nitride foundry platform coated in aluminum oxide grown using a post-process atomic layer deposition system. We discuss the design of the metamaterial waveguides and report experimental results for the hybrid waveguide devices.
更多查看译文
关键词
subwavelength gratings,metamaterials,atomic layer deposition,aluminum oxide,silicon nitride,integrated photonics
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要