Large area energy filter membranes for effective doping of silicon and silicon-carbide substrates through high-energy implantation

In this work we present the current state of large area energy filter membranes for the effective doping of silicon (Si) - and silicon carbide (SiC) substrates. The introduction of the first large area energy filter membranes on a 150mm SOI Wafer was in 2020 and we further developed the application fields and evaluated the corresponding structures. We will present in this work the development of a multi-level Si-energy filter, which is used for the creation of hydrogen-related donors (HDs). Additionally, the fabrication process will be discussed and a simulation of a multi-level implantation will be presented and discussed.