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Scalable Non-Volatile Tuning of Photonic Computational Memories by Automated Silicon Ion Implantation

Akhil Varri,Shabnam Taheriniya,Frank Brueckerhoff-Plueckelmann,Ivonne Bente,Nikolaos Farmakidis,Daniel Bernhardt,Harald Roesner,Maximilian Kruth,Achim Nadzeyka,Torsten Richter,Christopher David Wright,Harish Bhaskaran,Gerhard Wilde,Wolfram H. P. Pernice

Advanced Materials（2024）

Cited 6|Views11
Key words
electron energy-loss spectroscopy,focused ion implantation,micro-ring resonators,photonic integrated circuits,wavelength division multiplexing
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