Integrated Broadband Filter with Sharp Transition Edges Based on SiN and SiON Composite Waveguide Coupler

Broadband filters with sharp transition edges are important elements in diverse applications, including Raman and fluorescence spectral analysis, wideband wavelength-division multiplexing (WDM), and multi-octave interferometry. While the multi-layer thin-film interference broadband filter has been widely applied in various free-space optical systems, its integrated counterpart is still far from mature, which is also highly desired for constructing chip-scale miniature optical modules. In this article, we design, fabricate, and characterize an integrated broadband filter with sharp transition edges. An adiabatic coupler based on silicon nitride (SiN) and silicon oxynitride (SiON) composite waveguide is employed here. Long-pass, short-pass, band-pass, and band-stop filters can be realized in a single design of the composite waveguide coupler for a specific wavelength range, with only a difference in the SiN taper waveguide width. Experimental results with a roll-off value of larger than 0.7 dB nm-1 and a 15 dB extinction ratio (ER) are presented.