The Effect of Oxygen in The Environment to The Performance of PdNi Nano-Film Hydrogen Sensor

The effect of the oxygen in the environment to the performance of PdNi nano-film hydrogen sensor was studied in this work. Caused by oxygen absorption, the resistance of the sensor drops rapidly before it increases when hydrogen is introduced, and increases again after decreases to the bottom when hydrogen is discharged. This phenomenon interferes with the accurate detection of hydrogen concentration. Especially when the working temperature is increased and the detecting hydrogen concentration is decreased, the presence of oxygen causes more intense fluctuations in the resistance of the sensor. Finally, we found a way to effectively suppress the influence of oxygen, which is, using reactive sputtering with a proper amount of hydrogen to replace ordinary sputtering to fabricate PdNi nano-film.