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Si含量对(TiAlCrZrNb)-SiX-N高熵薄膜微观结构、力学性能和断裂韧性的影响

GAO Xin,WANG Jingjing,LIU Ping,MA Xun,ZHANG Ke,MA Fengcang,LI Wei, XU Kui, YAN Ziming, YING Yingyue

Journal of Functional Materials（2023）

Cited 0|Views20
Key words
magnetron sputtering technology,(TiAlCrZrNb)-Six-N films,microstructure,mechanical properties,toughness
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