Atomic layer deposition of SnO2 on In2O3 enables ultrasensitive NO2 detection at room temperature and DFT mechanism research

APPLIED SURFACE SCIENCE(2023)

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摘要
Atomic layer deposition of SnO2 on In2O3 nanosheets enables an extreme response of 2900 to 10 ppm NO2, which outperforms the reported metal oxide sensors.
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关键词
In2O3/SnO2 heterostructures,Atomic layer deposition,NO2,Room temperature,Gas sensor
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