Development of a Photoemission Microscopy Apparatus Using a Vacuum Ultraviolet Laser

We report on a photoemission microscopy apparatus using a 10.9-eV laser developed at the National Institute for Materials Science (NIMS). Our spectrometer realizes photoemission spectroscopy with a high spatial resolution by combining an imaging double energy analyzer with the electronic lens system of photoelectron emission microscopy. Energy-filtered photoelectron imaging is available in both real and momentum spaces. The spatial resolution in the real space mode is similar to 30 nm. We show energy-filtered photoelectron images of a silver grid-patterned sample in real space and the band mapping of Au(111) in momentum space to demonstrate the performance of our spectrometer.