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X-ray Multi-Scale Microfabrication System and X-Ray Imaging Evaluation System All in One Beamline

Kanta Yamamoto,Yuichi Utsumi,Ikuya Sakurai,Ikuo Okada,Kenji Hanada,Hidehiro Ishizawa,Masahiro Takeo, Taki Watanabe,Sho Amano,Satoru Suzuki,Koji Sumitomo,Akinobu Yamaguchi

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（2023）

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Key words
X-ray Imaging,Nanoscale Imaging,Imaging
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