Si-containing interlayer using tetramethylsilene for diamondlike carbon film adhesion on low-alloy steel: The role of the interlayer deposition time

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A(2023)

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摘要
Diamondlike carbon (DLC) coatings provide interesting properties for industrial applications. However, the low adhesion of DLC coatings on any type of ferrous alloy compromises technological applications. One possible solution to this issue is the application of adhesion interlayers. The aim of this study is to investigate the adhesion of DLC films on low-alloy steel through the use of silicon-containing interlayers at different deposition times using tetramethylsilane. The role of time on the physical-chemical, microstructural, and tribological properties of the material system was evaluated. The interlayer thickness linearly increased and greater contributions of silicon bonds were measured as a function of the interlayer deposition time. Nevertheless, longer deposition times increased the roughness and defect ratio in DLC coatings. Although good enough adhesion for decorative applications was acquired, no drastic variation in the average critical load (similar to 4.2 N) for delamination was observed at different deposition times for the samples that achieved adhesion.
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关键词
diamondlike carbon film adhesion,interlayer,tetramethylsilene,si-containing,low-alloy
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