Nanoimprinting for all-polymer electro-optic waveguide devices

Henrique Franciele,Maeder Andreas, Talts Ülle-Linda,Finco Giovanni,Pohl David,Kaufmann Fabian, Reig Escalé Marc,Elder Delwin,Dalton Larry,Grange Rachel

EPJ Web of Conferences(2023)

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摘要
We performed the design and fabrication of polymer waveguide circuits, aiming for applications as electro-optic devices. Uniform waveguides with over one centimeter of length were fabricated by soft nanoimprint lithography. These multimode waveguides present a height of 3 µm and low surface roughness (2 nm), with a thin residual layer of 600 nm. Propagation losses at 1550 nm are estimated to be around 7 dB/cm.
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关键词
waveguide,all-polymer,electro-optic
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