Arrayed Waveguide Grating Spectrometer on 2-µm-thick SOI Platform

EPJ Web of Conferences(2023)

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摘要
32-channel arrayed waveguide grating spectrometer (AWG) at 1800 nm is demonstrated on a 2-µm-thick silicon-on-insulator (SOI) platform. The design and simulation of the device are performed using the beam propagation method (BPM) and we obtain the 3-dB channel width, channel spacing, and extinction ratio of 1.16 nm, 1.56 nm, and 5.17 dB, respectively. The AWG demultiplexer can be applied in the central part of a spectrometer which is replacing in integrated optics a prism or a grating in conventional free-space optics.
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关键词
spectrometer,m-thick
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