Canon’s latest activity on micro-optics
2023 28th Microoptics Conference (MOC)(2023)
摘要
Canon’s original ultra-precision 3D cutting machine achieves sub-true nm accuracy under the cutting process, enabling ultra-precision devices with complex, sub nm optical mirror surfaces that are difficult to achieve by polishing or grinding, including diffraction gratings that used to require special machines, to be realized only by a common cutting process.
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