Effect of ZnCl2 assisted chemical bath deposition on preferred orientations and optical properties of ZnO films

The Journal of chemical physics(2023)

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摘要
Using zinc chloride as an additive assisted with conventional solutions of zinc acetate dihydrate and hexamethylenetetramine, the synthesis of ZnO films by chemical bath deposition was investigated and characterized by x-ray diffraction, field emission scanning electron microscopy, atomic force microscope, photoluminescence (PL) and UV-Vis spectrophotometry. ZnO films with (0002), (10 (1) over bar2), (11 (2) over bar2), (11 (2) over bar0), and (10 (1) over bar0) preferential growth orientation were prepared by changing the concentration of the introduced zinc chloride. The results of UV-Vis spectrophotometry show that the ZnO films with different preferential growth orientations have optical transmittance of more than 80% in the visible light region. Results from PL show that compared to the typical polar (0002) preferential growth orientation of ZnO, other films with different preferential growth orientations have different visible emissions. It was also confirmed that the concentration of Cl- can affect the defects and preferred orientations of ZnO films. This work enriches the fabrication of ZnO films with different preferential growth orientations and also provides new ideas for the fabrication of ZnO-based transparent nanodevices.
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zno,chemical bath deposition
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