A comparative study of photoelectric performance of Ga2O3 solar-blind photodetectors with symmetric and asymmetric electrodes

Chien-Yie Tsay,Hsuan-Meng Tsai,Phongsaphak Sittimart,Sreenath Mylo Valappil,Takafumi Kusaba,Tsuyoshi Yoshitake

Thin Solid Films（2023）

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摘要

•Transparent Ga2O3 semiconductor thin films were deposited by magnetron sputtering.•Results indicated the 1% oxygen flow ratio film had device quality characteristics.•Device with Ni-Ni symmetrical electrodes had good photoresponse characteristics.•Self-powered device realized by using paired Ni-Al asymmetric metal contacts.

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关键词

Ultra-wide bandgap semiconductors,Gallium oxide,Radio-frequency magnetron sputtering,Asymmetrical interdigitated electrodes,Solar-blind photodetectors

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