Design and Fabrication of Devices for Characterization of Cold Parameters in Self-Assembled Metal Helices

Divya J. Prakash, Marcos Martinez-Argudo,Shiva Hajitabarmarznaki,Max G. Lagally,Daniel W. van der Weide,Francesca Cavallo

2022 23rd International Vacuum Electronics Conference (IVEC)（2022）

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摘要

We describe the design and fabrication of devices for on-chip measurements of insertion and return loss in self-assembled helical slow-wave structures on Si substrates.

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关键词

Self-assembly,nanomembranes,microscale helices,scalability,S-parameters

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