Improved Multipactor Coatings Using Atomic Layer Deposition

Multipactor emission can be a serious issue for vacuum electron devices operating at megawatt power levels. It can lead to catastrophic failure from surface arcs or excessive heating of ceramic windows. Titanium nitride is effective at suppressing multipactor emission; however, sputter coating is not strongly bonded to surfaces and issue related to lifetime have arisen. It's also difficult to ensure a uniform coating over large surfaces. This research is investigating atomic layer deposition (ALD) as an improved alternative to sputtered coatings.