Measurement and Simulation of Ultra-Low-Energy Ion–Solid Interaction DynamicsMichael Titze,Jonathan D. Poplawsky,Silvan Kretschmer,Arkady V. Krasheninnikov,Barney L. Doyle,Edward S. Bielejec,Gerhard Hobler,Alex BelianinovMICROMACHINES（2023）引用 0|浏览3关键词focused ion beam,ion implantation,ultra-low energyAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
