Research on theoretical and experimental of Interference processing based on three-channel mutual injection phase-locked laser

With the advantage of obtaining multiple phase-locked laser outputs at the same time without complicated modulation devices, the multi-channel mutual injection technique provides a new idea to solve the problem of excessive use of beam splitting devices in traditional multi-beam interference processing systems. In this paper, we analyzed the phase-locking mechanism of the mutual injection technique, studied in detail the locking process of the phase difference of three lasers with time when their energy is injected into each other, and discussed the coherence characteristics of the three Gaussian beams after convergence. Accordingly, we built a three-beam interferometric processing system based on the three-channel mutual injection solid-state laser to process the surface of silicon material. The surface of the material was observed by SEM to exhibit a clear structure of regular shaped microporous arrays with a period of 3.0 µm distributed according to the regular pattern of positive hexagon, which was consistent with the interference pattern obtained from the simulation. The comprehensive theoretical and experimental results show that the laser obtained based on the three-channel mutual injection technique has good coherence characteristics and can be effectively applied in interference processing. This opens up a new idea for the development of interference processing equipment and has positive significance for the development of multi-beam interference processing.