SiC MOSFETs capacitance study
e-Prime - Advances in Electrical Engineering, Electronics and Energy(2023)
摘要
•SiC MOSFETs capacitance can give reliable insight in interface traps distribution.•Capacitance measured with floating terminals can provide additive information in TCAD model development.•Capacitance measured with positive-bias Drain exhibits a peak which is related to interface traps concentration.•Capacitance measured in different configurations can support the TCAD model description.
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关键词
capacitance,sic
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