SiC MOSFETs capacitance study

e-Prime - Advances in Electrical Engineering, Electronics and Energy(2023)

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摘要
•SiC MOSFETs capacitance can give reliable insight in interface traps distribution.•Capacitance measured with floating terminals can provide additive information in TCAD model development.•Capacitance measured with positive-bias Drain exhibits a peak which is related to interface traps concentration.•Capacitance measured in different configurations can support the TCAD model description.
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capacitance,sic
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