Multidimensional characterization of Ni-Zn ferrite films based on laser-induced breakdown spectroscopy technology

Existing experimental results have suggested that doping different elements will significantly affect the properties of the thin film produced using the target material. In this study, the properties of the film were studied under different powers and different pressures through the magnetron sputtering method of preparation of three elements containing nickel, zinc, and iron thin film. First, the film is subjected to laser-induced breakdown spectroscopy (LIBS) detection, and the obtained spectral data are processed to obtain the energy spectrum and two-dimensional (2D) distribution of the elements. Next, the film thickness was examined under a scanning electron microscope (SEM) to verify the feasibility of LIBS technology in film thickness measurement. Another set of experiments was performed to estimate the film thickness based on the obtained data to determine the accuracy of film thickness measurement using LIBS technology. Subsequently, the transmittal rate and energydispersive X-ray spectroscopy (EDS) of the thin film that was obtained by the sputtering of Nickel-zinc ferrite film were examined. The optical band gap of the thin film was determined following the transmittal rate of the thin film. Besides, the variation trend of the optical band gap was plotted and then compared with the LIBS spectral data. The statistical data of the element proportion were obtained through EDS, and the calibration curve was generated in combination with the LIBS spectral data. As revealed by the above-mentioned results, the LIBS is capable of analyzing the change of element content in the binary doped thin films.