Energy storage performance of in-situ grown titanium nitride current collector/titanium oxynitride laminated thin film electrodes

•In-situ sputtering of TiN/TiOxNy laminated films with intermediate buffer layers were developed for MSCs.•The buffer layers decease the lattice mismatch between the TiN and TiOxNy layers.•The high conductivity of TiN current collector layer can improve the rate response.•The buffer layers improve the interfacial bonding strength and interlayer conduction of the laminated films.