Laser Structured Silicon Based Multi Fourier Horn Resonator
2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)（2023）
关键词
piezoelectric transducer,ultrasonic nebulizer,silicon laser structuring
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要