Digital Micromirror Device Enabled Angle of Incidence Control for Microsphere Photolithography

Chen Zhu, Sergio Salinas Saenz,Edward Kinzel

2023 IEEE Research and Applications of Photonics in Defense Conference (RAPID)（2023）

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摘要

A Digital Micromirror Device (DMD) at the Fourier plane provides dynamic angular control at the image plane for microsphere photolithography, allowing for a +/- $26^{\circ}$ angle to be achieved on a microsphere array. A split ring resonator (SRR) on glass has been fabricated for demonstration.

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关键词

DMD,MPL,AOI control,Fourier mask

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