Diamond FET and MEMS Dvivices

Yasuo Koide,Jiangwei Liu,Meiyong Liao,Masataka Imura

2023 IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, ISAF（2023）

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摘要

Diamond FET and MEMS devices are developed using a high-quality single crystal epilayer grown by a microwave plasma chemical deposition technique. A hydrogen-terminated diamond surface, a metal/diamond contact interface, and a smart cut technique are a key role to obtain excellent device performance.

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