Photonic integrated circuit with multiple waveguide layers for broadband high-efficient 3-D OPA

Dachuan Wu,Bowen Yu,Venus Kakdarvishi,Yasha Yi

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We demonstrated a 3-D optical phased array device, based on multi-layer Si 3 N 4 /SiO 2 stacks. The multi-waveguide-layer configuration allows utilizing edge couplers at both the input and the emitting ends to achieve broadband high efficiency.

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