Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

In this study, a new method was developed to realize two-dimensional (2D) figure correction of grazing-incidence X-ray mirrors using a one-dimensional (1D) ion-beam figuring system. A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area. Accordingly, a long mirror could be manufactured. Using this method, the surface height root-mean-square (RMS) error of the center area of 484 mm ×16 mm was reduced from 11.49 nm to 2.01 nm, and the 1D meridional RMS error reached 1.0 nm. The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.