MIS capacitor as portable oxygen detection sensor

The Oxygen (O 2 ) gas detection is important in many activities of life and environment control. The present work proposed a photoluminescent O 2 sensor device based in the metal insulating semiconductor (MIS) capacitor. The sensor system used MIS capacitor as photodetector where it was directly integrated the active photoluminescent film. The results obtained pointed out that the proposed device exhibit high sensitivity to the presence of O 2 molecules, showing non-linear response in the range of concentrations of oxygen from 0 to 100% with the most sensitive region in the range of O 2 concentrations between 0 and 50%. This sensitivity range is within the O 2 concentration expected for applications in environmental control.