Suppression of crosstalk in row–column actuator array using regulation of ferroelectric polarization

Applied Materials Today(2023)

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摘要
•Row–column array configuration reduces actuator element interconnections.•Individual array elements can be controlled by adjusting the DC bias.•Bias is adjusted by switching the polarization state of the ferroelectric film.•Orthogonal biasing with coercive voltage is used to suppress electrical crosstalk.•Orthogonal biasing addresses single target elements in the row–column array.
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关键词
Crosstalk, Ferroelectric thin film, Row -column array, Piezoelectric actuator
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