Fully Integrated Laser Doppler Vibrometer (LDV) Based on Hybrid 3D Integration of Silicon Nitride and Polymer Photonic Circuits with Operation in the Khz Regime

A. Raptakis,L. Gounaridis,M. Kleinert,M. Weigel,J. P. Epping,E. Schreuder,M. Wolfer, A. Draebenstedt, R. Pessina,P. Groumas, T. Aukes, V. Seyfried,N. Keil,R. Heideman,H. Avramopoulos,C. Kouloumentas

INTEGRATED OPTICS DEVICES, MATERIALS, AND TECHNOLOGIES XXVII（2023）

Cited 1|Views21

Key words

3D photonic integration,hybrid integration,laser Doppler vibrometer,stress optic modulation,silicon nitride platform,polymer platform,optical frequency shift

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