Structural and optical properties of triple-layer for high-uniformity beam division

In this paper, a triple-layer grating beam splitter with three-port output is designed. Through the combination of rigorous coupled-wave analysis (RCWA) and simulated annealing algorithms (SAA), the calculation and optimization of each parameter of the grating is carried out to make the diffraction efficiency of the grating meet the conditions. At the incident wavelength of 800 nm, the diffraction efficiencies of 0th order and +/- 1st order under TE polarization are 31.6% and 31.4%, respectively. The diffraction efficiencies of 0th order and +/- 1st order under TM polarization are 32.7% and 32.5%, respectively. It can be seen that not only the total diffraction efficiency under TE polarization and TM polarization exceeds 90%, but also the uniformity of diffraction efficiency at each order exceeds 99%. Finally, the in degrees uence of grating parameters and incident wave characteristics on diffraction efficiency is discussed.