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Effect of Substrate and Growth Method on Vanadium Dioxide Thin Films by RF Magnetron Sputtering: Vanadium Metal Oxidation Vs Reactive Sputtering

A. Christensen,A. B. Posadas,B. Zutter, P. Finnegan, S. Bhullar, S. Bishop,A. A. Talin,A. A. Demkov

Journal of Applied Physics（2023）

Cited 1|Views21
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