Direct synthesis of MoS2 films on flexible substrates at low temperature
NATURE NANOTECHNOLOGY(2023)
摘要
Monolayer MoS2, a two-dimensional semiconductor, was directly synthesized on polymer and ultrathin-glass substrates at 150 & DEG;C using a metal-organic chemical vapour deposition strategy. The high-quality MoS2 films enabled the construction of various integrated circuits on flexible substrates without the need for an additional transfer process.
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