Effect of dielectric substrate on gold nanoscale lateral vacuum emission devices

Field emission (FE) characteristics of 2-terminal Au lateral nanoscale vacuum field emission devices with different dielectric substrates is reported in this work. Field orthodoxy is tested with the Murphy Good plot. Poole-Frenkel leakage is presented as a primary mechanism for emission at low voltages through the substrates with some reported burn-in effects removed with correct substrate choice. The results are significant in that the leakage effects can be difficult to discern from pure PE and are thus important to consider in future designs of these types of devices.