A Review of Flexible Acceleration Sensors Based on Piezoelectric Materials: Performance Characterization, Parametric Analysis, Frontier Technologies, and Applications

Coatings(2023)

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摘要
Acceleration sensors are tools for detecting acceleration and serve purposes like fault monitoring and behavior recognition. It is extensively employed in a variety of industries, including aerospace, artificial intelligence, biology, and many more. Among these, one of the major research hotspots and challenges is the development of low-energy, self-powered, miniature, mass-produced sensors. Due to its capacity to perceive human behavior and identify errors, the flexible acceleration sensor offers a distinct advantage in the use of flexible and miniaturized sensing systems. This review analyzes the current state of piezoelectric flexible acceleration sensors' applications in the areas of sensitive materials, processing technology, and device structure and briefly summarizes the fundamental properties of these sensors. Additionally, it ends with a prognosis for the future growth of flexible piezoelectric acceleration sensors.
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关键词
flexibility, acceleration sensor, piezoelectric materials, 3D printing, MEMS technology
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