O2 vs. Ar Gas Cluster Ion Beam Sources for ToF-SIMS Depth Profiling of Thick Polymer and Metal Film Samples.

Christine M Mahoney,Albert J Fahey,Kaveh Adib, Ruchi Yongsunthon, Ming-Hui Zhang

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada（2023）

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metal film samples,tof-sims

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