High-Density Nanopatterning of SiGeAsTe Chalcogenide As Ovonic Threshold Switch Selectors for Memory Applications
ACS APPLIED NANO MATERIALS（2023）
Key words
chalcogenides,SiGeAsTe,dry chemical etch,ovonic threshold switch,high-density patterning,full wafer processing,nanopatterning
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined