A Flexible on-chip phase calibration method for optical phased array

We demonstrate a 32-element silicon OPA chip with on-chip phase calibration. The on-chip phase calibration structure consists of interferometric structures and germanium silicon photodetectors (GeSi PDs). This structure can control any angle deflection within the scanning range without detecting the far-field patterns. In the horizontal direction, the on-chip phase calibration structure is used to achieve beam steering within the 36 degrees scanning range, and the side-lobe suppression ratio can be close to 7dB.