A Highly Integrated 3D MEMS Force Sensing Module with Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

Cheng Hou,Kaiyao Wang,Fengxia Wang,Hanyang Li,Liang Lou,Songsong Zhang,Yuandong Gu,Huicong Liu,Tao Chen,Lining Sun

ADVANCED FUNCTIONAL MATERIALS（2023）

引用 12|浏览27

关键词

force sensing modules,instrument-tissue interaction forces,MEMS-based piezoresistive force sensors,robotic-assisted minimally invasive surgery (RMIS),variable sensitivity

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