28nm HKMG 1F-1R2 Multilevel Memory for Inference Engine Application

2023 INTERNATIONAL VLSI SYMPOSIUM ON TECHNOLOGY, SYSTEMS AND APPLICATIONS, VLSI-TSA/VLSI-DAT(2023)

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摘要
This article reports 28 nm high-k-metal-gate (HKMG) based 3bits/cell memory with one ferroelectric (Fe) field effect transistor (FeFET) and one reconfigurable resistor (R-2). R-2, connected with the select line (SL) and the drain terminal of the FeFET, can be reconfigured via the SL terminal. R-2 can be implemented by using a standard metal-oxide-semiconductor field effect transistor (MOSFET) as voltage controlled resistor or any two terminal programmable resistors. The detailed discussion about R-2 is beyond the scope of this paper. The 1F-1R(2) cells demonstrate current-based 3bits/cell operation over a 300mm wafer and stable retention characteristics at 85 degrees C for all eight current levels.
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关键词
drain terminal,FeFET,ferroelectric field effect transistor,high-k-metal-gate,HKMG 1F-1R2 multilevel memory,inference engine application,reconfigurable resistor,select line,size 28.0 nm,size 300.0 mm,SL terminal,standard metal-oxide-semiconductor field effect transistor,temperature 85.0 degC,two terminal programmable resistors,voltage controlled resistor,word length 3.0 bit
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