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Integration of a Stacked Contact MOL for Monolithic CFET.

Victor Vega-Gonzalez,D. Radisic,Bt Chan,S. Choudhury, S. Wang, A. Mingardi, Q. Toan Le, H. Decoster,Y. Oniki, P. Puttarame,Kevin Vandersmissen,J. P. Soulie,A. Peter,A. Sepulveda,D. Batuk,G. T. Martinez,Olivier Richard,Jürgen Bömmels,S. Biesemans,E. Dentoni Litta,Naoto Horiguchi, S. Park,Zsolt Tokei

2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)（2023）

Cited 2|Views9
Key words
CFET,MOL,edge-placement error
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