Structural and mechanical properties of multi-component TiVTaNbZrHf and (TiVTaNbZrHf)N coatings for biomedical applications

Thin Solid Films(2023)

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摘要
•High target utilization sputtering of TiVTaNbZrHf, and (TiVTaNbZrHf)N coatings.•Hardness of the 1-2 µm-thick coatings reached 35 ± 1.2 GPa.•(TiVTaNbZrHf)N coatings for biomedical applications show remarkable biocompatibility.•Good preosteoblastic MC3T3E1 cell proliferation and high cell viability observed.
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关键词
mechanical properties,multi-component
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