Graphene-based physical sensors for humidity, temperature and strain detections

Microelectronic Engineering(2023)

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摘要
Recently, graphene has emerged as a promising electrode material for various flexible electronics considering its excellent electrical conductivity, high surface area, thermal conductivity, flexibility and mechanical strength. Based on these excellent properties, many researchers have fabricated various graphene-based temperature, humidity, and strain sensors, which have made important contributions in agricultural/industrial production, daily life, and consumer electronics. This paper first summarizes the sensing principles and methods to optimize the performance of these graphene sensors, then classifies their main application scenarios. Finally, a summary of the sensitive elements, manufacturing processes and sensing performance of this type of sensors in recent years is presented, with the aim of promoting the development of graphene-based physical sensors.
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关键词
Graphene, Sensors, Electromechanical systems, Health monitoring
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