Bias sputtering of granular L1 0 -FePt films with hexagonal boron nitride grain boundaries

Scientific reports(2023)

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摘要
In this paper, we present an experimental study of L1 0 -FePt granular films with crystalline boron nitride (BN) grain boundary materials for heat assisted magnetic recording (HAMR). It is found that application of a RF substrate bias ( V DC = -15 V) yields the formation of hexagonal boron nitride ( h -BN) nanosheets in grain boundaries, facilitating the columnar growth of FePt grains during sputtering at high temperatures. The h -BN monolayers conform to the side surfaces of columnar FePt grains, completely encircling individual FePt grains. The resulting core–shell FePt-( h -BN) nanostructures appear to be highly promising for HAMR application. The high thermal stability of h -BN grain boundaries allows the deposition temperature to be as high as 650℃ such that high order parameters of FePt L1 0 phase have been obtained. For the fabricated FePt-( h -BN) thin film, excellent granular microstructure with FePt grains of 6.5 nm in diameter and 11.5 nm in height has been achieved along with good magnetic hysteresis properties.
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